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LumaSense Technologies GmbH

IMPAC Pyrometer IS 12-Si

Pyrometers

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Digital high-end pyrometer for non-contact temperature measurement of silicon wafers from 350 °C.

The IS 12-Si is a special version of the IS 12, developed for the temperature measurement of silicon wafers.

The pyrometer is equipped with a optical narrow band filter in the near infrared. This enables a reliable measurement of thin silicon from 350°C which otherwise is transparent for infrared radiation.

In this special spectral range the emissivity of silicon is 67% and it is almost independent from temperatures. This allows the IS 12-Si to detect the correct temperature of the silicon wafer.

In the beginning of the temperature range the IS 12-Si is sensitive against light. The sensitivity decreases with increasing temperature.

In applications which require the low temperatures at the beginning of the range this effect can be avoided by screening against the light.

For measurements of silicon wafers 4 Temperature ranges between 350 and 1800 °C Spectral range: narrow band in the near infrared, especially for measurements of silicon 6 fixed optics and 3 focus-able optics Response time 10 ms, adjustable up to 10 s
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See also

Temperature sensors Thermal measurement Temperature regulation Thermal infrared cameras Thermometers Temperature standard Climate chambers Thermostats

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