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EDWARDS SAS

Pyrophoric Conditioning System (PCS)

Gas disposal

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The Pyrophoric Conditioning System (PCS) is a compact, cost-effective unit using the 'self-oxidation' principle to safely remove silane from PECVD and LPCVD process exhausts to below flammable limits.

The system offers many advantages over the simple "burn box". A positive air input, with full monitoring and interfacing to the process tool, offers assurance of operation.

A unique particle handling system keeps ducts free from powders. A water wash-down is available as an option to further reduce preventative maintenance requirements.

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