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EDWARDS SAS

Exhaust Management Systems : Spectra-G

Gas disposal

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The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.

The Spectra-G can incorporate up to six independent inlet ports. The independent inlet ports ensure that premixing of incompatible gases does not take place upstream of the burner.

This means that simultaneous input of incompatible gases can be treated by a single Spectra-G through different inlets.
   

Maximum gas flow rate : 800 slm Number of inlet ports : 1 to 6 Electrical supply : 200-208 VAC 3-phase Input frequency : 50/60 ±2 Hz Power consumption : 4 kW Nitrogen supply pressure : 7 bar Fuel gas supply pressure : 137 mbar (2 psi) Extract flow rate : 60 Nm 3/min Mass : 850 Kg
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