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EDWARDS SAS

Inward Fired Combustors : Atlas TCS

Gas disposal

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Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders.

The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

The Atlas TCS provides reliable, high performance, low cost abatement of flammable and acid gases from CVD exhausts.

The Atlas TCS incorporates the unique inward-fired radiant combustor and high-efficiency multi-stage water scrubber developed for the Thermal Processing range and is ideally suited to the treatment of exhaust streams from CVD tools employing remote plasma NF3 cleans and high flows of F2.

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Exhaust Management Systems : Spectra-G

Exhaust Management Systems : Spectra-G

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Exhaust Management Systems : Spectra Z

Exhaust Management Systems : Spectra Z

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Inward Fired Combustors : Atlas Helios

Inward Fired Combustors : Atlas Helios

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