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EDWARDS SAS

Wet Electro-static Precipitator (WESP)

Gas disposal

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Edwards offers the WESP (Wet Electro-static Precipitator) for the efficient removal of particles downstream of a process chamber abatement device.

The system transfers the particles into a water stream without generating significant backpressure, and can be used in conjunction with most abatement devices.

Efficient removal of particles from semiconductor process exhausts minimizes the risk of blockages in exhaust ducts. WESP is well-suited for 300 mm CVD, FPD, Solar Cell and MOCVD processes.

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