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Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 2800 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 2800 litres of this plasma system offers enough space to serve series production.
Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.
Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings
Main features:
Floor-standing enclosure
Vacuum chambers: Stainless steel
Chamber volume: approx. 2800 litres
Gas supply: 3 gas channels via MFCs, Mass Flow Controller (MFC)
Generator frequencies: 80 kHz (0 - 1000/3000 W), 13.56 MHz (0 - 600/1000 W), 2.45 GHz (0 - 1200 W)
Controls: Full PC control (Windows 10 IoT)
Pressure measurement: Pirani, capacity manometer
The Tetra 2800 plasma systems are mainly used in the following areas:
Analytics, archaeology, automotive, research and development departments, semiconductor technology, small batch production, plastics technology, medical technology, microsystems technology, sensor technology, sterilisation, textile technology
Diener electronic offers forward-looking solutions in the areas of:
- Low pressure plasma systems for surface treatment
- Atmospheric pressure plasma systems for surface treatment
- Parylene coating systems
- Aluminium vacuum chambers made of a unique, flexible and patented chamber system
- Complete vacuum systems and plants for a wide range of applications
- Test inks for the determination of surface tension
- Plasma indicators for the detection of a successful plasma treatment
- Plasma generators
Dimensions (Stand Alone - 19" Rack): 600 mm x 1700 mm x 800 mm (WxHxD)Vacuum Chamber material: Stainless steelVacuum Chamber dimensions: Ø 1200 mm, D 2500 mmVacuum Chamber volume: approx. 2800 litresVacuum Chamber closure: Hinged doorGas supply: 3 gas channels via MFCs, Mass Flow Controller (MFC)Pressure measurement: Pirani, Capacity pressure gaugeGenerator: 80 kHz; 13,56 MHz; 2,45 GHzElectrodes: Single or multi-layer side electrodesControles: Full PC (Win.10 IoT)
OTHER PRODUCTS PLASMA DISCHARGE, CORONA DISCHARGE FROM Diener electronic GmbH & Co. KG