Plasma-Surface-Treatment-System | Tetra 30

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 30 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 34 up to 50 litres of this plasma system offers enough space to serve series production / automation.

Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.

Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...
Etching of PTFE, photoresist, oxide layers, ...
Super-hydrophobic and -hydrophilic coatings

Main features:
Floor-standing enclosure
Vacuum chambers: Stainless steel or aluminium
Chamber volume: 34 - 50 litres
Gas supply: Mass Flow Controllers (MFCs)
Generator frequencies: 40 kHz (0 - 1500 W), 80 kHz (0 - 3000 W), 13.56 MHz (0 - 300 W), 2.45 GHz (0 - 850 W)
Controls: Basic PC control (Windows CE), Full PC control (Windows 10 IoT)
Pressure measurement: Pirani, capacity manometer

The Tetra 30 plasma systems are mainly used in the following areas:
Analytics, archaeology, automotive, research and development departments, semiconductor technology, small batch production, plastics technology, medical technology, microsystems technology, sensor technology, sterilisation, textile technology

Diener electronic offers forward-looking solutions in the areas of:
- Low pressure plasma systems for surface treatment
- Atmospheric pressure plasma systems for surface treatment
- Parylene coating systems
- Aluminium vacuum chambers made of a unique, flexible and patented chamber system
- Complete vacuum systems and plants for a wide range of applications
- Test inks for the determination of surface tension
- Plasma indicators for the detection of a successful plasma treatment
- Plasma generators