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NEMS Solutions: Ultra performance solution for dynamic measurement in-plane and out-of-plane

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Presentation

Features:

- Available for the PhotoMap 3D and ZoomSurf 3D profilers.
- Dynamic characterization of vibrating MEMS allowing a precise measurement of in-plane and out-of-plane vibration mode shapes and deformations.
- Frequency range from 100 Hz to 2 MHz.
- Fully automated measurement technique.
- Measurement of amplitude and vibration phase maps for direct comparaison with finite element simulation results.
- Excitation electronics provide electrostatic (voltage), piezo electric (voltage) or thermal (current) actuation of MEMS.

OTHER PRODUCTS SOIL ANALYSIS FROM FOGALE NANOTECH

PHOTOMAP 3D: Interferometric sensor for fast D measurements

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MICROSURF 3D: Optical profiler for accurate and repeatable 3D metrology

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ZOOMSURF 3D for 3D measurements

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CYBERSURF 3D: Automatic and manual semiconductor process control

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