Plasma-Surface-Treatment-System | Zepto

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Zepto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 1 - 4 litres of this plasma system offers enough space to serve laboratory and also small series production.

Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised.

Fields of application:
VOC-free cleaning of organic residues on silicone, plastic, copper, nickel, ...
Activation before painting, gluing, potting, ...

Main features:
Table housing
Vacuum chambers: Borosilicate glass, RIE - bell aluminium, rectangular chamber, soda-lime glass
Chamber volume: approx. 1 - 4 litres
Gas supply: Needle valves, Mass Flow Controllers (MFCs)
Generator frequencies: 40 / 100 kHz power 0 - 100 W, 13.56 MHz power 0 - 200 W, 2.45 GHz power 0 - 150 W
Controls: Manual, rotary switch, basic PC control (Windows CE)

Zepto plasma systems are mainly used in the following areas:
Analytics, archaeology, automotive, research and development departments, semiconductor technology, small batch production, plastics technology, medical technology, microsystems technology, sensor technology, sterilisation, textile technology

Diener electronic offers forward-looking solutions in the areas of:
- Low pressure plasma systems for surface treatment
- Atmospheric pressure plasma systems for surface treatment
- Parylene coating systems
- Aluminium vacuum chambers made of a unique, flexible and patented chamber system
- Complete vacuum systems and plants for a wide range of applications
- Test inks for the determination of surface tension
- Plasma indicators for the detection of a successful plasma treatment
- Plasma generators