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MICRO-EPSILON France

White light interferometer for absolute distance measurements

Interferometer

“ Industry optimized sensors with robust metal housing and flexible cables ”
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Optimized for industrial purposes and offering an accuracy that creates an unprecedented level of precision in optical distance measurements - these are the new white light interferometers from Micro-Epsilon.
                        
With a resolution of < 30 picometers, the innovative interferoMETERs from Micro-Epsilon achieve a new level of precision in optical measurement technology.
 
The IMS5400-DS is used for industrial distance measurements. The measuring system provides absolute measurement values and detects, for example, steps and edges reliably without signal loss. These compact and robust sensors can be integrated in restricted installation spaces.
 
The IMS5600-DS is designed for distance measurements in clean rooms and vacuum environments (up to UHV). Special controller calibration enables subnanometer resolution, which is required, for example, when aligning a sensor or positioning a stage.
 
 
The interferoMETERs consist of a controller, a sensor and a fiber optic cable. They are designed for industrial measurement tasks and so are equipped with a robust metal housing and highly flexible cables.
 
Numerous analog and digital interfaces such as Ethernet and EtherCAT enable easy connection. 

Simple parameter set up via web interface Best-in-Class: Resolution < 30 picometers (IMS5600-DS) Large offset distance High signal stability due to new evaluation algorithms and active temperature compensation Sensors and cables suitable for vacuum
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See also

Measuring systems Data acquisition systems Data acquisition systems Sensing device Other measuring systems Camera for industrial vision Accessories for machine vision

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