Dynamic characterization of microstructures (MEMS, MOEMS, etc.)

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“ All-in-one systems allowing the full mechanical characterization of your devices in a very short time. From vibration measurements (in plane and out of plane) to the topographie (roughness, waviness, etc.), one system combines several measurement techniques - Laser Doppler vibrometry (out of plane vibrations, picometer resolution) - Video stroboscopy (In plane Vibrations, sub-nanometer resolution) - White light interferometry (Topography, sub-nanometer resolution) ”

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Presentation

Inspired by the growing variety of Microelectromechanical systems (MEMS), Polytec has developed an innovative line of microscope systems for the measurements of MEMS dynamics and topography.

The MSA-500 Micro System Analyzer is the premier, fully-integrated, measurement tool for the analysis and visualization of structural vibrations and surface topography in micro structures. For wafer-level testing, all systems can easily be mounted onto manual or fully automated probe stations.

Polytec's new UHF-120 Ultra-High-Frequency Vibrometer has an extended bandwidth that allows characterization of out-of-plane vibration frequencies up to 1.2 GHz. Despite incorporating a new optical design, the vibrometer retains the familiar advantages and features that make Polytec vibrometers the industry's gold standard.

Link microstructures analysis video

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White light interferometer for absolute distance measurements

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