GEMINI system

Special machines

“ - Wafer transfer system - Can be fully customized - Compatible with all the most used cassettes and wafers ”

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Presentation

GEMINI is one of the smallest semi-automatic batch wafer transfer systems worldwide.

It is simple to use and easy to maintain! GEMINI can load and unload a batch of wafers 6″ or 8″ from cassette to cassette in less than 30 seconds. The batch can contain from 1 to 25 wafers to be transferred.

GEMINI can be fully customized to fulfill high expectations of cassettes, boats, or wafers. Already compatible with all the most used cassettes and wafers on semiconductor industry, the GEMINI can also be designed for special customer’s needs.

Technical features

PEEK MATERIEL FOR PUSHERS DOUBLE CASSETTE SENSOR WAFER PRESENCE DETECTION IN CASSETTE WAFER PRESENCE DETECTION ON HEAD WAFER DOWN SAFETY DETECTION CURRENT LIMITERS ON ALL MOTORS POWER « OFF » SECURITY TOP PUSHER SAFETY INTERLOCK TOUCH SCREEN 7’’ B&R TECHNOLOGIES

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