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EDWARDS SAS

turbomolecular pump : STPH301C ISO100K Inlet

Vacuum pump

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Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications.

The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

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