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EDWARDS SAS

Turbomolecular pump : STPH301C DN100CF Inlet

Vacuum pump

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Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications.

The pumps field proven reliability and class-leading performance give maximum process flexibility.

The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Max Nitrogen throughput : 2500 sccm Rated speed : 48000 rpm Starting time : 4 min Maximum inlet flange temperature : 120 °C Power consumption : 0.6 kVA Pump weight : 15 kg Controller weight : 9 kg
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