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EDWARDS SAS

Turbomolecular pump : STP-XA4503C

Vacuum pump

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The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.
 
This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. 
 
It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.

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