Semicon - optical systems and chucks for semiconductor

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Optical designOptical tolerancing with modern software tools (CodeV, Zemax)Mechanical design with 3D CAD SoftwareOpto-Mechanical designR & D of thin-film coatingsFEM-supported simulation...

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Presentation

For the semiconductor market we offer:

mask/reticle/wafer folder

inspection systems

mask writer

We serve the market with development, design and production of high precision key components, lens systems, objectives and clean room assembling and adjustment of complete modules and sub-systems.

It starts with our customers' idea and the fully understanding of our customers' needs, in-house feasibility and specification, design and prototyping and - after a final design review - it results in manufacturing and management of after-sales services for our customers.

Fast, flexible, competent and reliable.

We provide highly precise optics and opto-mechanical systems for the lithography market including stages for wafers and masks.

We produce complex assemblies for back-end and front-end applications, for excimer lasers, mask and wafer inspection systems.

We support the next generation of lithography tools by producing vacuum and electrostatic chucks for a wide range of different applications.