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EDWARDS SAS

Medium and Large Dry Pumps and Systems : Drystar 80/EH500 PFPE SSP and Silencer 200V 60 Hz

Vacuum pump

iXL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120...

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Drystar80 is the most cost effective introduction to basic dry pumping. It is available as a stand-alone unit for 80 m3h-1 repeatable pumping performance; or in a combination with the respected EH500 hydrokinetic drive mechanical booster, offering 500 m3h-1 displacement for applications where increased pumping speed and/or lower vacuum levels are required. Depending upon the application the Drystar80 can be supplied with mineral oil or PFPE lubrication.

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Vacuum systems Electric membrane pumps Electric nozzle pumps Vacuum pump

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