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Catalogue excerpt General brochure

GET IN TOUCH 8, rue Georges Besse 34830 Clapiers, FRANCE +33 467 594 808 sales@r2d-automation.com www.r2d-automation.com COMET MONOSTATION • • • • • • • SORTER OCR FROM 3’’ TO 300mm 25 → 25 wafers 25 + 25 → 50 wafers 25 → 12 + 13 wafers Cassette to cassette / cassette to boat Wafer / carrier / heat sensors SECS / GEMS communication • • • • 2,3,4 load ports Front & Back scribe reading Data base recipes, manual drag & drop. Compatible with thin wafers, vacuum or edge contact • SECS / GEMS communication • COMET 2 STATION • • • • • • TTOP ORGANIZER • • • • • • 25 → 25 Wafers Cassette to cassette / cassette to boat Wafer / Carrier / heat sensors Pitch changing Back To Back SECS / GEMS communication Split / Merge yours wafers from cassette to cassette Compact, randomize, drag & drop, lot transfer etc Make your own recipes From 3’’ to 8’’ wafer Visual Inspection recipe included SECS / GEMS communication COMET 3 STATION • • • • • • • • ID READER • • • • • 25 → 25 Wafers 25 + 25 → 50 wafers 25→ 12 +13 wafers Cassette to cassette / cassette to boat Wafer / Carrier / heat sensors Back To Back SECS / GEMS communication GEMINI • • • • • 25 → 25 wafers Cassette to cassette Small Footprint Notch or Flat Aligner SECS / GEM communication Check if you have the right wafer inside the proper cassette Front & Back scribe reading Data base recipes, manual function Compatible with cooper & nitrite wafers SECS / GEMS communication SORTER IN LIGN GET IN TOUCH • • • • Load / Unload dummies Carrier identification by barcode reader Back To Back SECS /GEM communication 8, rue Georges Besse 34830 Clapiers, FRANCE +33 467 594 808 sales@r2d-automation.com www.r2d-automation.com

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