LiSA_AE: Automatic wafer loading / unloading 150, 200mm and 300mm R2D is a worldwide leading automation company specialized in semi & solar wafer handling. The R2D automation offering for the semiconductor industry includes the following: • R2D proven COMET system for wafer transfer between transport cassette and quartz boat. • Integrated 6 axis robot for transfer of the quartz boats to and from the loader on the furnace (paddle) • Extra options available: SECS/GEM, notch aligning, storage/buffer positions, ESD combs, ionizer The LISA System is a new generation of Boat Auto Loader for Horizontal furnace. Using a 6 axes Robot, the LISA will automatically Load/Unload multiple types of boat from Furnace paddle to Buffer/Load port and back. With his multiple boat handling system, we can manage different process avoiding cross contamination. The LISA coupled with a shuttle and a Comet wafer transfer system could provide a full complete handling solution. The LISA have different configurations possible: ➢ Lift with boat/baffle stocker: ➢ Lift with carrier /boat stocker ➢ Lift with Comet wafer transfer (transfer 25 to 25 or 2x25 to 50 wafers) ➢ Customized config/design possible