ZOOMSURF 3D for 3D measurements | Contact FOGALE NANOTECH

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ZOOMSURF 3D for 3D measurements

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Presentation

Fully automated optical profiling system for research and production applications.

Features:

- Sub-nanometer vertical resolution (down to 0.1 nm) at all magnifications
- Non-contact measurements allowing accurate and repeatable results
- All axes motorization enabling automatic stitching of multiples fields of view
- Automated measurement sequence
- Sub-nanometric roughness measurements
- Easy to use and production-ready
- Automated step height and surface flattening functions

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PHOTOMAP 3D: Interferometric sensor for fast D measurements

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MICROSURF 3D: Optical profiler for accurate and repeatable 3D metrology

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CYBERSURF 3D: Automatic and manual semiconductor process control

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NEMS Solutions: Ultra performance solution for dynamic measurement in-plane and out-of-plane

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